简单介绍：
此系列的微机械激光扫描镜分为1D和2D产品，即根据其其扫描轴为单轴或双轴而不同。此类微光机电光束扫描镜也被称为微扫描镜或者微光机电光束偏转器。
详情介绍：
此系列的微机械激光扫描镜分为1D和2D产品，即根据其其扫描轴为单轴或双轴而不同。此类微光机电光束扫描镜也被称为微扫描镜或者微光机电光束偏转器。
The mirror plate of the microscanner performs a continuous, harmonic oscillation. The oscillation is excited electrostatically and utilizes planar electrostatic comb drives. The oscillation-frequency has to be close to the natural frequency of the scanning axis. Adjusting the driving voltage or the driving frequency allows setting and controlling the
oscillation amplitude. For 2D devices, the mirror plate is gimbal-mounted. The resonance frequency of each axis is determined by design independently. Each axis is excited individually. Thus, the ratio of the oscillation amplitudes and the phase difference can be set and controlled arbitrarily.

Important Notice

Performance figures, data and any illustrative material provided in this data sheet are typical and must be specifically confirmed in writing by F-tone Networks before they become applicable to any particular order or contract. In accordance with the F-tone Networks policy of continuous improvement specifications may change without notice.

The publication of information in this data sheet does not imply freedom from patent or other protective rights of F-tone Networks or others. Further details are available from any F-tone Networks sales representative.